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Conference Paper
Surface passivation for silicon heterojunction solar cells by hodrogenated amorphous silicon using inductively coupled plasma chemical vapor deposition
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- Authors
- Kyu-Sung Lee, Chang Bong Yeon, Sun Jin Yun, Jung Wook Lim
- Issue Date
- 2012-11
- Citation
- Global Photovoltaic Conference (GPVC) 2012
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Chemical vapour deposition(CVD), Heterojunction solar cells(SHJ), Inductively coupled plasma chemical vapor deposition(ICP-CVD), Silicon heterojunction solar cells, Surface passivation, amorphous silicon, inductively coupled plasma(ICP)