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학술대회
Surface passivation for silicon heterojunction solar cells by hodrogenated amorphous silicon using inductively coupled plasma chemical vapor deposition
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- 발행일
- 201211
- 출처
- Global Photovoltaic Conference (GPVC) 2012
- 협약과제
- 11MB7400, 초고효율 소자구조 및 저가 공정기술을 결합한 융합형 태양 전지 개발, 임정욱
- KSP 제안 키워드
- Chemical vapour deposition(CVD), Inductively coupled plasma chemical vapor deposition, Inductively-coupled plasma(ICP), Silicon heterojunction solar cells, Surface passivation, amorphous silicon