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Conference Paper The Properties of SiOC Thin Film via Reactive RF Magnetron Sputter Method

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Authors: Kyung Hyun Kim, Nae-Man Park, Jae-heon Shin, Chan-Hwa Hong, Bosul Kim, Woo-Seok Cheong

Issue Date: 2012-08

Citation: International Materials Research Congress (IMRC) 2012

Language: English

Type: Conference Paper

KSP Keywords: Reactive RF magnetron sputter, thin film(TF)

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