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Conference Paper The Study of ITO Film via RF Sputter Using Hydrogen Mixed Ar Gas for Thin Film Solar Cell
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Authors
Kim Kyung Hyun, Kim Ju-Hee, Soojeong Park, Cho Daehyung, Kim Je Ha
Issue Date
201208
Source
International Materials Research Congress (IMRC) 2012, pp.1-1
Project Code
11MB3100, Development of High Efficiency CIGS Ultra Thin-Film Solar Cells by Reactive Sputtering, Kim Je Ha
KSP Keywords
Ar gas, ITO film, RF sputter, Thin film solar cells, thin film(TF)
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