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Conference Paper
The Study of ITO Film via RF Sputter Using Hydrogen Mixed Ar Gas for Thin Film Solar Cell
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- Authors
- Kyung Hyun Kim, Ju-Hee Kim, Soo Jeong Park, Dae Hyung Cho, Jeha Kim
- Issue Date
- 2012-08
- Citation
- International Materials Research Congress (IMRC) 2012, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Ar gas, ITO film, RF sputter, Thin film solar cells, thin film(TF)