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Journal Article Design and Fabrication of Vibration Based Energy Harvester Using Microelectromechanical System Piezoelectric Cantilever for Low Power Applications
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Authors
Moonkeun Kim, Sang-Kyun Lee, Yil Suk Yang, Jaehwa Jeong, Nam Ki Min, Kwang-Ho Kwon
Issue Date
2013-12
Citation
Journal of Nanoscience and Nanotechnology, v.13, no.12, pp.7932-7937
ISSN
1533-4880
Publisher
American Scientific Publishers (ASP)
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1166/jnn.2013.8106
Project Code
13VB2300, Development of High Voltage/Current Power Module and ESD for BLDC Motor, Yang Yil Suk
Abstract
We fabricated dual-beam cantilevers on the microelectromechanical system (MEMS) scale with an integrated Si proof mass. A Pb(Zr,Ti)O3 (PZT) cantilever was designed as a mechanical vibration energy-harvesting system for low power applications. The resonant frequency of the multilayer composition cantilevers were simulated using the finite element method (FEM) with parametric analysis carried out in the design process. According to simulations, the resonant frequency, voltage, and average power of a dual-beam cantilever was 69.1 Hz, 113.9 mV, and 0.303 μW, respectively, at ptimal resistance and 0.5 g (gravitational acceleration, m/s2). Based on these data, we subsequently fabricated cantilever devices using dual-beam cantilevers. The harvested power density of the dual-beam cantilever compared favorably with the simulation. Experiments revealed the resonant frequency, voltage, and average power density to be 78.7 Hz, 118.5 mV, and 0.34 μW, respectively. The error between the measured and simulated results was about 10%. The maximum average power and power density of the fabricated dual-beam cantilever at 1 g were 0.803 μW and 1322.80 μW cm?3, respectively. Furthermore, the possibility of a MEMS-scale power source for energy conversion experiments was also tested. Copyright © 2013 American Scientific Publishers.
KSP Keywords
Average power density, Design and fabrication, Design process, Dual-beam, Energy Conversion, Energy Harvesting(EH), Finite Element Method(FEM), Gravitational acceleration, Low power applications, Micro-electro-mechanical system(MEMS), Parametric analysis