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Conference Paper
Siliconized Silsesquioxane-based Nonstick Mold for Fabrication of Sub-10 nm Features
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- Authors
- Bong Kuk Lee, Jaehoon Park, Jin-Hwa Ryu, Kyu-Ha Baek, Lee-Mi Do
- Issue Date
- 2013-02
- Citation
- 나노 임프린트·몰딩·프린트 학술 대회 (nano-IMP) 2013, pp.66-67
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Sub-10 nm