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Conference Paper
Effects of Inductively Coupled Plasma on the Properties of ITO Source/Drain Electrode for ZnO-based Thin-film Transistors
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- Authors
- Issue Date
- 2013-04
- Citation
- MRS Meeting 2013 (Spring), pp.1-1
- Language
- English
- Type
- Conference Paper
- Project Code
- 12VB3700, Development of oxide semiconductors and the high density oxide semiconductor targets for display, Cheong Woo-Seok
- KSP Keywords
- Drain electrode, Inductively-coupled plasma(ICP), Thin-Film Transistor(TFT), thin film(TF)