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Conference Paper Effects of Inductively Coupled Plasma on the Properties of ITO Source/Drain Electrode for ZnO-based Thin-film Transistors
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Authors
Issue Date
2013-04
Citation
MRS Meeting 2013 (Spring), pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Drain electrode, Thin-Film Transistor(TFT), inductively coupled plasma(ICP), thin film(TF)
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