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Journal Article A Fiber-to-Chip Coupler Based on Si/SiON Cascaded Tapers for Si Photonic Chips
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Authors
Hyundai Park, Sanggi Kim, Jaegyu Park, Jiho Joo, Gyungock Kim
Issue Date
2013-12
Citation
Optics Express, v.21, no.24, pp.29313-29319
ISSN
1094-4087
Publisher
Optical Society of America(OSA)
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1364/OE.21.029313
Abstract
This paper reports a fiber-to-chip coupler consisting of a silicon inverted taper and a silicon oxynitride (SiON) double stage taper, where the cascaded taper structure enables adiabatic mode transfer between a submicron silicon waveguide and a single mode fiber. The coupler, fabricated by a simplified process, demonstrates an average coupling loss of 3.6 and 4.2 dB for TM and TE polarizations, respectively, with a misalignment tolerance of 짹 2.2 μm for 1 dB loss penalty. © 2013 Optical Society of America.
KSP Keywords
Coupling loss, Double stage, Loss penalty, Silicon waveguide, Single-mode fiber(SMF), Taper structure, misalignment tolerance, silicon oxynitride
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