상세정보
학술지
A Fiber-to-Chip Coupler Based on Si/SiON Cascaded Tapers for Si Photonic Chips
- 발행일
- 201312
- 출처
- Optics Express, v.21 no.24, pp.29313-29319
- ISSN
- 1094-4087
- 출판사
- Optical Society of America(OSA)
- 초록
- This paper reports a fiber-to-chip coupler consisting of a silicon inverted taper and a silicon oxynitride (SiON) double stage taper, where the cascaded taper structure enables adiabatic mode transfer between a submicron silicon waveguide and a single mode fiber. The coupler, fabricated by a simplified process, demonstrates an average coupling loss of 3.6 and 4.2 dB for TM and TE polarizations, respectively, with a misalignment tolerance of 짹 2.2 μm for 1 dB loss penalty. © 2013 Optical Society of America.
- KSP 제안 키워드
- Coupling loss, Double stage, Loss penalty, Silicon waveguide, Single-mode fiber(SMF), Taper structure, misalignment tolerance, silicon oxynitride