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Journal Article Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications
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Authors
Seung Eon Moon, Nak-Jin Choi, Hyung-Kun Lee, Jaewoo Lee, Woo Seok Yang
Issue Date
2013-08
Citation
ETRI Journal, v.35, no.4, pp.617-624
ISSN
1225-6463
Publisher
한국전자통신연구원 (ETRI)
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.4218/etrij.13.1912.0008
Project Code
12MB2400, Development of self-powered smart sensor node platform for smart&green building, Kim Jongdae
Abstract
Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a NO2 or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop-coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module. © 2013 ETRI.
KSP Keywords
CO gas sensor, Change in resistance, Drop-coated, Environmental monitoring, Low-Power, Metal-oxide(MOX), Micro-electro-mechanical system(MEMS), Monitoring applications, Personal digital assistant(PDA), Real-Time, Semiconductor type