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Conference Paper
Low Power Consumption Micro C2H5OH Gas Sensor based on Micro-heater and Ink Jetting Technique
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- Authors
- S. E. Moon, H-K. Lee, N-J. Choi, W. S. Yang, J. K. Kwon
- Issue Date
- 2013-09
- Citation
- International Conference on Surfaces, Coatings and Nanostructured Materials (NanoSMat) 2013, pp.68-68
- Language
- English
- Type
- Conference Paper
- Abstract
- Micro C2H5OH gas sensor was fabricated based on micro-heater and indium oxide thick film with low power consumption and high sensitivity1. Semiconducting In2O3 nanopowders were synthesized via co-precipitation method, and to increase the sensitivity for alcohol gas rare metal dopants were added. Bridge type micro-heater based on Si substrate was fabricated by surface micromachining technique and in the structure of micro-heater, the resistances of two semi-circled Pt heaters are connected to the spreader for thermal uniformity. Micro gas sensor showed substantial sensitivity down to 0.2 ppm alcohol at low power consumption (28 mW) and endurance characteristics for 104 times pulse operation with 28 mW power.
- KSP Keywords
- Bridge type, High Sensitivity, Metal dopants, Micro gas sensor, Micro-heater, Micromachining technique, Rare metal, Sensor based, Si substrate, Thermal uniformity, Thick films