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Conference Paper Microcrystalization of Hydrogenated SiGe Thin Films Depending on Ge Content and Surface State of Substrate
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Authors
S. J. Yun, S. H. Lee, Y. J. Lee, J. W. Lim, J. K. Kim
Issue Date
2013-05
Citation
Photovoltaic Technical Conference (PVTC) 2013, pp.1-2
Language
English
Type
Conference Paper
KSP Keywords
Ge content, surface states, thin film(TF)