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Journal Article Index-Matched Indium Tin Oxide Electrodes for Capacitive Touch Screen Panel Applications
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Authors
Hong Chan-Hwa, Shin Jae-Heon, Ju Byeong-Kwon, Kim Kyung-Hyun, Park Nae-Man, Kim Bo-Sul, Cheong Woo-Seok
Issue Date
2013-11
Citation
Journal of Nanoscience and Nanotechnology, v.13, no.11, pp.7756-7759
ISSN
1533-4880
Publisher
American Scientific Publishers (ASP)
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1166/jnn.2013.7814
Project Code
13VB1500, Development of window-unified 30˝ touch sensor, Cheong Woo-Seok
Abstract
Index-matched indium tin oxide (ITO) electrodes for capacitive touch screen panels have been fabricated to improve optical transmittance and reduce the difference of reflectance (?뼞R) between the etched and un-etched regions. 8.5 nm Nb2O5 and 49 nm SiO2 thin films were deposited by magnetron sputtering as index-matching layers between an ITO electrode and a glass substrate. In case of 30 nm ITO electrode, a 4.3% improvement in the optical transmittance and a ?뼞R of less than 1% were achieved, along with a low sheet resistance of 90 廓/?뼞. Copyright © 2013 American Scientific Publishers.
KSP Keywords
5 nm, Capacitive Touch screen, Glass substrate, ITO electrode, Indium tin oxide electrodes, Magnetron sputtering, Optical transmittance, indium tin oxide(ITO), low sheet resistance, matching layer, thin film(TF)