상세정보
학술지
Index-Matched Indium Tin Oxide Electrodes for Capacitive Touch Screen Panel Applications
- 발행일
- 201311
- 출처
- Journal of Nanoscience and Nanotechnology, v.13 no.11, pp.7756-7759
- ISSN
- 1533-4880
- 출판사
- American Scientific Publishers (ASP)
- 협약과제
- 13VB1500, 윈도우 일체형 30인치급 터치센서 개발, 정우석
- 초록
- Index-matched indium tin oxide (ITO) electrodes for capacitive touch screen panels have been fabricated to improve optical transmittance and reduce the difference of reflectance (?뼞R) between the etched and un-etched regions. 8.5 nm Nb2O5 and 49 nm SiO2 thin films were deposited by magnetron sputtering as index-matching layers between an ITO electrode and a glass substrate. In case of 30 nm ITO electrode, a 4.3% improvement in the optical transmittance and a ?뼞R of less than 1% were achieved, along with a low sheet resistance of 90 廓/?뼞. Copyright © 2013 American Scientific Publishers.
- KSP 제안 키워드
- 5 nm, Capacitive Touch screen, Glass substrate, ITO electrode, Indium tin oxide electrodes, Magnetron sputtering, Optical transmittance, indium tin oxide(ITO), low sheet resistance, matching layer, thin film(TF)