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학술지 Seebeck Coefficient Characterization of Highly Doped n- and p-Type Silicon Nanowires for Thermoelectric Device Applications Fabricated with Top-Down Approach
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김재현, 현영훈, 박영삼, 최원철, 김수정, 전효진, 정태형, 장문규
Journal of Nanoscience and Nanotechnology, v.13 no.9, pp.6416-6419
American Scientific Publishers (ASP)
13ZB1100, 스마트 융.복합 IT부품소재 기술개발, 남은수
A silicon nanowire one-dimensional thermoelectric device is presented as a solution to enhance thermoelectric performance. A top-down process is adopted for the definition of 50 nm silicon nanowires (SiNWs) and the fabrication of the nano-structured thermoelectric devices on silicon on insulator (SOI) wafer. To measure the Seebeck coefficients of 50 nm width n- and p-type SiNWs, a thermoelectric test structure, containing SiNWs, micro-heaters and temperature sensors is fabricated. Doping concentration is 1.0× 1020 cm-3 for both for n- and p-type SiNWs. To determine the temperature gradient, a temperature coefficient of resistance (TCR) analysis is done and the extracted TCR value is 1750-1800 PPM 쨌 K-1. The measured Seebeck coefficients are -127.583 μV 쨌 K-1 and 141.758 μV 쨌 K-1 for n- and p-type SiNWs, respectively, at room temperature. Consequently, power factor values are 1.46 mW 쨌 m -1 쨌 K-2 and 1.66 mW 쨌 m-1 쨌 K-2 for n- and p-type SiNWs, respectively. Our results indicate that SiNWs based thermoelectric devices have a great potential for applications in future energy conversion systems. © 2013 American Scientific Publishers.
KSP 제안 키워드
Doping concentration, Energy conversion systems, Future energy, Highly doped, K-2, Micro-heater, Nano-structured, One-dimensional, Power factor(P.F), Room-temperature, Seebeck coefficient