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Low Power Consumption and High Sensitive NO2 Micro Gas Sensor based on Co-planar Micro-heater fabricated by using CMOS-MEMS Process
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- Authors
- S. E. Moon, J.-W. Lee, S.-J. Park, J. Park, K.-H. Park, J. Kim
- Issue Date
- 2010-01
- Citation
- Journal of the Korean Physical Society, v.56, no.1, pp.434-438
- ISSN
- 0374-4884
- Publisher
- 한국물리학회 (KPS)
- Language
- English
- Type
- Journal Article
- Abstract
- Small-scale, low-power-consumption, and high-sensitivity NO2 gas sensors based on ZnO nanorods are reported in this work. To activate the chemical absorption and desorption for NO2 gas, we embedded co-planar micro-heater in a micro gas sensor, that was made by using a Complementary Metal-oxide-semiconductor compatible Microelectromechanical Systems(CMOS-MEMS) process. To acquire simple fabrication and low fabrication cost, we located the micro-heater and the sensing electrode in the same plane. High-quality single-crystalline ZnO nanorods were selectively grown by using photolithography and a hydrothermal method. Their structural properties were confirmed by using X-ray diffractometry (XRD), energy dispersive X-ray spectroscopy microanalysis (EDAX), Scanning Electron Microscopy (SEM), and Transmission Electron Microscopy (TEM). The temperature-dependent current-voltage characteristics were measured to optimize the operating temperature of the fabricated devices as a chemical gas sensor. To test the possibility for use as chemical sensor, we measured the NO2 gas response.
- KSP Keywords
- CMOS-MEMS, Chemical absorption, Chemical gas sensor, Chemical sensors, Co-Planar, Complementary metal-oxide-semiconductor(CMOS), Gas response, High Sensitivity, High sensitive, High-quality, MEMS process