BROWSE
Detail
Conference Paper
Temperature-insensitive silicon ring fabricated by DUV lithography and overlaid with highly negative thermo-optic TiO<inf>2</inf>
Cited 1 time in 
Share 
Share
- Authors
- Jong Moo Lee
- Issue Date
- 2014-08
- Citation
- International Conference on Group IV Photonics (GFP) 2014, pp.67-68
- Language
- English
- Type
- Conference Paper
- Abstract
- Temperature-dependent spectral variations of 5μm-radius silicon ring resonators, which are fabricated by deep ultra-violet (DUV) lithography and overlaid by air, silica and highly negative thermo-optic TiO2, respectively, are compared by experiment.
- KSP Keywords
- DUV lithography, Ring resonator, Silicon ring, Temperature-dependent, Thermo-optic, Ultra-violet, temperature-insensitive