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Conference Paper
Post-Passivation Buffered Oxide Etch and Plasma Treatment Effects on AlGaN/GaN SBDs
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- Authors
- Jeho NA, Jung-Jin KIM, Hyun Gyu JANG, Youngrak PARK, Chi-Hoon JUN, Sang Choon KO, Eun Soo NAM
- Issue Date
- 2014-12
- Citation
- International Symposium on the Physics of Semiconductors and Applications (ISPSA) 2014, pp.129-129
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Oxide etch, Treatment effects, plasma treatment