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Conference Paper
The Fabrication of High Mobility Oxide Semiconductor Thin-Film Transistors Compatible with Back-Channel Etch Process
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- Authors
- Sung Haeng Cho, Sang-Hee Ko Park, Min Ki Ryu, Hee-Ok Kim, Oh-Sang Kwon, Eun-Sook Park, Jong-Heon Yang, Himchan Oh, Jong-Woo Kim, Su-Jae Lee, Chi-Sun Hwang
- Issue Date
- 2014-08
- Citation
- International Meeting on Information Display (IMID) 2014, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Thin-Film Transistor(TFT), back-channel etch, high mobility, oxide semiconductor, thin film(TF)