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Conference Paper
Bottom-inlet-type MEMS Acoustic Sensors based on Two Polyimide/A-Si Sacrificial Layers
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- Authors
- Jaewoo Lee, C.H. Je, W.S. Yang, J.K. Kwon
- Issue Date
- 2014-06
- Citation
- Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT) 2014, pp.1-2
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- A-Si, Acoustic Sensor, Sacrificial layer