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Conference Paper
Formation of Ohmic Contact to AlGaN/GaN Heterostructure on Sapphire
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- Authors
- Zin-Sig Kim, Hokyun Ahn, Jong-Won Lim, Eunsoo Nam
- Issue Date
- 2014-02
- Citation
- 한국진공학회 정기 학술 대회 (동계) 2014, pp.292-292
- Publisher
- 한국진공학회
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- AlGaN/GaN heterostructure, ohmic contact