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Journal Article Fabrication of a Nanosize Pattern Embedded Plastic Chip via an Injection Molding Method for Application to an Optical Biosensor
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Authors
K. H. Kim, W. Kim, J. C. Hong, H. S. Ko, B. K. Kim, C. Huh, G. Y. Sung
Issue Date
2010-12
Citation
International Polymer Processing, v.25, no.5, pp.341-345
ISSN
0930-777X
Publisher
Carl Hanser Verlag GmbH & Co. KG
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.3139/217.2357
Abstract
We demonstrate a commercialized injection molding method for nano patterning of polymethyl methacrylate (PMMA) for the purpose of mass production of a label-free optical biosensor chip. Scanning electron microscope (SEM) images clearly show uniform nanopattern transfer on the plastic chip fabricated by an injection molding method. A uniformly deposited silicon nitride layer having a high refractive index by a plasma enhanced chemical vapor deposition (PECVD) technique is also observed. A unique characterization method is described wherein optical resonance reflection is used accurately and quickly to characterize the geometrical sensor structure. The authors anticipate that this robust method will provide an excellent means of producing an optical resonance reflection biosensor (ORRB). © Carl Hanser Verlag GmbH & Co. KG.
KSP Keywords
High refractive index, Injection Molding, Label-free optical biosensor, Nano-patterning, Nitride layer, Optical resonance, Robust methods, Silicon Nitride, characterization methods, mass production, optical biosensor chip