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학술지 Fabrication of a Nanosize Pattern Embedded Plastic Chip via an Injection Molding Method for Application to an Optical Biosensor
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저자
김경현, 김완중, 홍종철, 고현성, 김봉규, 허철, 성건용
발행일
201012
출처
International Polymer Processing, v.25 no.5, pp.341-345
ISSN
0930-777X
출판사
Carl Hanser Verlag GmbH & Co. KG
DOI
https://dx.doi.org/10.3139/217.2357
협약과제
08MC2500, 유비쿼터스 건강관리용 모듈 시스템, 박선희
초록
We demonstrate a commercialized injection molding method for nano patterning of polymethyl methacrylate (PMMA) for the purpose of mass production of a label-free optical biosensor chip. Scanning electron microscope (SEM) images clearly show uniform nanopattern transfer on the plastic chip fabricated by an injection molding method. A uniformly deposited silicon nitride layer having a high refractive index by a plasma enhanced chemical vapor deposition (PECVD) technique is also observed. A unique characterization method is described wherein optical resonance reflection is used accurately and quickly to characterize the geometrical sensor structure. The authors anticipate that this robust method will provide an excellent means of producing an optical resonance reflection biosensor (ORRB). © Carl Hanser Verlag GmbH & Co. KG.
KSP 제안 키워드
Injection Molding, Label-free optical biosensor, Nano-patterning, Nitride layer, Robust methods, Silicon Nitride, characterization methods, high refractive index, mass production, optical biosensor chip, optical resonance