상세정보
학술지
Fabrication of a Nanosize Pattern Embedded Plastic Chip via an Injection Molding Method for Application to an Optical Biosensor
- 발행일
- 201012
- 출처
- International Polymer Processing, v.25 no.5, pp.341-345
- ISSN
- 0930-777X
- 출판사
- Carl Hanser Verlag GmbH & Co. KG
- 초록
- We demonstrate a commercialized injection molding method for nano patterning of polymethyl methacrylate (PMMA) for the purpose of mass production of a label-free optical biosensor chip. Scanning electron microscope (SEM) images clearly show uniform nanopattern transfer on the plastic chip fabricated by an injection molding method. A uniformly deposited silicon nitride layer having a high refractive index by a plasma enhanced chemical vapor deposition (PECVD) technique is also observed. A unique characterization method is described wherein optical resonance reflection is used accurately and quickly to characterize the geometrical sensor structure. The authors anticipate that this robust method will provide an excellent means of producing an optical resonance reflection biosensor (ORRB). © Carl Hanser Verlag GmbH & Co. KG.
- KSP 제안 키워드
- Injection Molding, Label-free optical biosensor, Nano-patterning, Nitride layer, Robust methods, Silicon Nitride, characterization methods, high refractive index, mass production, optical biosensor chip, optical resonance