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Conference Paper Novel technique for PDMS micro patterning using dry etching and photolithography
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Authors
H.W. Kim, S.J. Bang, W.I Jang, S.H. Kong
Issue Date
2014-11
Citation
International Microprocesses and Nanotechnology Conference (MNC) 2014, pp.1-2
Language
English
Type
Conference Paper
KSP Keywords
Novel technique, dry etching, micro patterning
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