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Conference Paper The Effects of Electrodes Patterned onto the Membrane on Frequency Response Characteristics of PMN-PT Piezoelectric MEMS Acoustic Actuators
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Authors
H. J. Kim, W. S. Yang
Issue Date
2014-06
Citation
Electroceramics Conference 2014, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Frequency response characteristics, PMN-PT, piezoelectric MEMS
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