본 논문에서는 X-대역 능동 위상 배열 레이더 시스템에 사용되는 MMIC 다기능 칩을 0.5 μm p-HEMT 상용 공정을 이용하여 저전력 특성을 가지도록 개발하였다. 다기능 칩은 6-비트 디지털 위상 천이 기능, 6-비트 디지털 감쇠 기능, 송/수신 모드 선택 기능, 신호 증폭 기능 등의 다양한 기능을 제공한다. 16 mm2(4 mm×4 mm) 칩 크기의 소형으로 제작된 MMIC 다기능 칩은 7~11 GHz에서 10 dB의 송/수신 이득 특성과 14 dBm의 P1dB 특성을 가지며, DC 소모 전력이 0.6 W로 매우 낮은 저전력 특성을 보였다. 그리고 6-비트, 64 상태에 대해 위상 천이 특성과 감쇠 특성의 측정 결과, 동작 주파수에서 3°의 RMS(Root Mean Square) 위상 오차와 0.6 dB의 RMS 감쇠 오차를 보였다.
KSP Keywords
GaAs MMIC, Root-Mean-Square(RMS), pseudomorphic high electron mobility transistor(pHEMT)
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