상세정보
학술지
Postfabrication Trimming of CMOS-Compatible Athermal MZI by Thermal Annealing
- 발행일
- 201602
- 출처
- IEEE/OSA Journal of Lightwave Technology, v.34 no.4, pp.1288-1292
- ISSN
- 0733-8724
- 출판사
- IEEE, OSA
- 협약과제
- 15PB5900, 실리콘 포토닉스 기반 SDN용 12채널 4x8 광스위치 모듈 개발, 이종무
- 초록
- CMOS-compatible athermal MZI is postfabrication trimmed in wavelength from -0.15 to -5.15 nm using thermal annealing process from 400 to 530 °C. The MZI filter shows temperature dependence less than 2 pm/°C and the temperature dependence is maintained after the annealing process.
- KSP 제안 키워드
- 5 nm, CMOS-compatible, Thermal annealing, annealing process, temperature dependence