상세정보
학술대회
Athermal and Wavelength-Trimmable Silicon MZI
- 발행일
- 201603
- 출처
- Optical Fiber Communication Conference (OFC) 2016, pp.1-3
- 협약과제
- 15PB5900, 실리콘 포토닉스 기반 SDN용 12채널 4x8 광스위치 모듈 개발, 이종무
- 초록
- CMOS-compatibly fabricated silicon athermal MZI is trimmed in wavelength by the amount from -0.15 to -5.15 nm using thermal annealing process over 400 °C. Temperature-dependence less than 2 pm/°C is maintained after the annealing.
- KSP 제안 키워드
- 5 nm, Thermal annealing, annealing process, temperature dependence