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Athermal and Wavelength-Trimmable Silicon MZI
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- Authors
- Jong-Moo Lee, Min-Su Kim, Maryse Fournier, Pierre Labeye, Claudio J Oton, Francesco Testa
- Issue Date
- 2016-03
- Citation
- Optical Fiber Communication Conference (OFC) 2016, pp.1-3
- Publisher
- IEEE
- Language
- English
- Type
- Conference Paper
- Abstract
- CMOS-compatibly fabricated silicon athermal MZI is trimmed in wavelength by the amount from -0.15 to -5.15 nm using thermal annealing process over 400 °C. Temperature-dependence less than 2 pm/°C is maintained after the annealing.
- KSP Keywords
- 5 nm, Thermal annealing, annealing process, temperature dependence