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High Sensitive NO2 Gas Sensor with Low Power Consumption Using Selectively Grown ZnO Nanorods
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- Authors
- S. J. Park, J. Park, H. Y. Lee, S. E. Moon, K.-H. Park, J. Kim, S. Maeng, F. Udrea, W. I. Milne, G. T. Kim
- Issue Date
- 2010-05
- Citation
- Journal of Nanoscience and Nanotechnology, v.10, no.5, pp.3385-3388
- ISSN
- 1533-4880
- Publisher
- American Scientific Publishers (ASP)
- Language
- English
- Type
- Journal Article
- Abstract
- The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO 2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO 2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value. Copyright © 2010 American Scientific Publishers All rights reserved.
- KSP Keywords
- CMOS compatible process, Gas response, Gas sensing, Growth method, High sensitive, Initial value, Low Power consumption, NO 2, Selective area, Sensitive response, Sensor device