상세정보
학술지
High Sensitive NO2 Gas Sensor with Low Power Consumption Using Selectively Grown ZnO Nanorods
- 발행일
- 201005
- 출처
- Journal of Nanoscience and Nanotechnology, v.10 no.5, pp.3385-3388
- ISSN
- 1533-4880
- 출판사
- American Scientific Publishers (ASP)
- 협약과제
- 09MB1500, 유비쿼터스 단말용 부품 모듈, 김종대
- 초록
- The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO 2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO 2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value. Copyright © 2010 American Scientific Publishers All rights reserved.
- KSP 제안 키워드
- CMOS compatible process, Gas response, Gas sensing, Growth method, High sensitive, Initial value, NO 2, Response characteristics, Selective area, Sensitive response, Sensor device