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Conference Paper
Influence of Silicon Nitride Layer on MIM Capacitor for MMIC
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- Authors
- Min Jeong Shin, Ho-Kyun Ahn, Sang-Heung Lee, Dong-Min Kang, Dong-Young Kim, Kyu Jun Cho, Jae-Won Do, Hyun-Wook Jung, Sung-Jae Chang, Hae-Cheon Kim, Hyoung-Sup Yoon, Byoung-Gue Min, Jong-Min Lee, Seong-Il Kim, Chul-Won Ju, Eun-Soo Nam, Yongsoon Baek, Jong-Won Lim
- Issue Date
- 2016-07
- Citation
- International Symposium on the Physics of Semiconductors and Applications (ISPSA) 2016, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- MIM capacitor, Nitride layer, Silicon Nitride