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Conference Paper
Advanced Backend Processing and its Effects on the Performance and the Yield of GaN HEMT Deviceson SiC Substrate
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- Authors
- Jae-Won Do, Min Jeong Shin, Hyun-Wook Jung, Haecheon Kim, Byoung-Gue Min, Ho-Kyun Ahn, Hyung Sup Yoon, Kyu-Jun Cho, Jong-Won Lim, Yong Hwan Kwon, Eun Soo Nam
- Issue Date
- 2016-02
- Citation
- 한국 반도체 학술 대회 (KCS) 2016, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- GaN HEMT, SiC substrate