상세정보
학술지
A Silicon Nitride Microdisk Resonator with a 40-nm-Thin Horizontal Air Slot
- 발행일
- 201005
- 출처
- Optics Express, v.18 no.11, pp.11209-11215
- ISSN
- 1094-4087
- 출판사
- Optical Society of America(OSA)
- 협약과제
- 10ZC1100, 메가컨버전스 핵심기술 개발, 함호상
- 초록
- We design and fabricate pedestal-type, 15 μm diameter silicon nitride microdisk resonators on Si chip with horizontal air-slot using selective wet etching between Si, SiO2, and SiNx. As the slot structure is determined by deposition process, air slots that are as thin as 40 nm and as deep as 5 μm with ultra-smooth slot surfaces can easily be fabricated with photolithography only. Fundamental TM-like slot mode in which the E-field is greatly enhanced within slot was observed with an intrinsic Q factor of ~34,000 ( {\\lambda}res= 1523.7nm) and energy overlap in slot region of 21.6%. © 2010 Optical Society of America.
- KSP 제안 키워드
- 40 nm, As 4, Quality-factor(Q-factor), Selective wet etching, Silicon Nitride, Slot region, Ultra-smooth, deposition process, e-field, microdisk resonator