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Journal Article
Fabrication of Micro-Lens Arrays with Moth-Eye Antireflective Nanostructures using Thermal Imprinting Process
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- Authors
- Sang Soon Oh, Choon-Gi Choi, Young-Sung Kim
- Issue Date
- 2010-11
- Citation
- Microelectronic Engineering, v.87, no.11, pp.2328-2331
- ISSN
- 0167-9317
- Publisher
- Elsevier
- Language
- English
- Type
- Journal Article
- Abstract
- We fabricated micro-lens arrays which have moth-eye antireflective nanostructures on their surfaces using thermal imprinting process and plasma treatment and characterized the morphology of the micro-lens arrays. After a micro-lens array shape was fabricated on a photoresist using photolithography and thermal reflow process, patterns were transferred onto a Ni stamp, and then micro-lens patterns were replicated on a polycarbonate film using thermal imprinting lithography. Using reactive ion etching, we were able to form the moth-eye antireflective nanostructures on the surface of polycarbonate films and polycarbonate micro-lens arrays. The AFM and SEM images of the plasma treated samples clearly show that the moth-eye nanostructures are formed on the surface. By measuring the transmittance spectrum using a UV-visible spectrometer, we also show that the moth-eye structures really act as antireflection coatings. © 2010 Elsevier Ltd. All rights reserved.
- KSP Keywords
- AFM and SEM, Imprinting Lithography, Microlens array, Moth-eye structure, Reactive ion etching, Reflow process, SEM images, Transmittance spectrum, UV-visible, antireflection coating, plasma treatment