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학술대회 A Field Emission Nano-focus X-ray Source with Effective Electron Beam Focusing Module
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저자
박소라, 정진우, 김재우, 강준태, 연지환, 신민식, 김성희, 고은솔, 전효진, 최영철, 송윤호
발행일
201607
출처
International Vacuum Nanoelectronics Conference (IVNC) 2016, pp.1-2
DOI
https://dx.doi.org/10.1109/IVNC.2016.7551511
협약과제
16ZB1900, 나노 전자원 기술연구, 송윤호
초록
We developed a field emission nano-focus x-ray source using carbon nanotube (CNT) emitters and electron beam (E-beam) focusing modules, which could be used in the applications requiring the high-resolution x-ray images. For the nano-size focusing of E-beam from CNT emitters, we designed special focusing modules consisting of electrostatic and magnetic lenses. The geometries and operating conditions of focusing modules were optimized to give the desired demagnification characteristics by performing the electron optics simulations of the designed x-ray source under external electric and magnetic fields. We constructed and operated an open-type nano-focus x-ray system using the focusing modules under a high-voltage condition to attain the high-resolution x-ray images. The results showed a possibility of field emission nano-focus x-ray sources with a relatively high current and controllable magnification through the effective focusing modules.
KSP 제안 키워드
Carbon nano-tube(CNT), E-Beam, Electric and magnetic fields, Electron beam focusing, Electron optics, High Voltage, High current, High-resolution, Magnetic field(MF), Magnetic lenses, Nano-size