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Conference Paper
Development of a Field Emission Nano-focus X-ray Source with Electrostatic and Magnetic Lenses for Semiconductor Inspections
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- Authors
- Yoon-Ho Song, Sora Park, Jae-Woo Kim, Jun-Tae Kang, Jin-Woo Jeong, Ji-Hwan Yeon, Min-Sik Shin, Sunghee Kim, Eunsol Go, Hyojin Jeon, Young Chul Choi
- Issue Date
- 2016-02
- Citation
- 한국 반도체 학술 대회 (KCS) 2016, pp.1-1
- Language
- English
- Type
- Conference Paper
- Abstract
- We developed a field emission nano-focus x-ray source using CNT yarn emitters and electron beam (E-beam) focusing modules for the nondestructive semiconductor inspections [1]. CNT yarn was used as the field electron emitter due to its stable and high-current-density electron emission characteristics. In order to obtain nano-focus x-ray we designed special E-beam focusing modules by combining electrostatic and magnetic lenses. We performed electron optics simulations of the designed x-ray source under the external electric and magnetic fields to optimize the geometries and operating conditions of focusing modules, giving the desired demagnification characteristics. We constructed and operated an open-type nano-focus x-ray source under a high-voltage condition to attain high-resolution x-ray images. The developed x-ray tube showed a nanometer-size focal spot with relatively high tube current and controllable magnification through the focusing modules, providing the possibility to achieve a nanoscale resolution x-ray imaging.
- KSP Keywords
- CNT yarn, E-beam, Electron beam, Electron emission characteristics, Electron optics, Field Emission, Field electron emitters, Focal spot, High Current Density, High Voltage, High resolution