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Conference Paper A Study on the Field Emission Nano-focus X-ray Source using Effective E-beam Focusing Module
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Authors
Issue Date
2016-04
Citation
한국광학회 차세대 리소그래피 학술 대회 2016, pp.1-1
Publisher
한국광학회
Language
English
Type
Conference Paper
KSP Keywords
E-beam, Field Emission, X-ray sources, beam focusing
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