상세정보
학술지
Gas Sensitivity Modulation of Oxide Thin Films by Means of an Electrical Method
- 발행일
- 201007
- 출처
- Sensors and Actuators B : Chemical, v.148 no.2, pp.539-543
- ISSN
- 0925-4005
- 출판사
- Elsevier
- 협약과제
- 09ZH1300, ETRI 연구역량 강화를 위한 R&D체계 구축 및 Seed형 기술개발을 위한 창의형 연구 사업, 현창희
- 초록
- To enhance the sensitivity of a metal oxide-based gas sensor, we introduce a novel electrical method that relies jointly on the use of impedance and an applied DC bias. We used polycrystalline ZnO-NiO composite thin films prepared by pulsed layer deposition as CO gas sensor material. The applied DC bias lowers the interface barrier between oxide grains and thereby enhances the sensitivity. Our approach enhances the sensitivity to CO gas by approximately 200% more than a conventional DC method. The enhancement effect is more pronounced when the CO concentration is lowered. This method offers an efficient characterization tool for modulating the sensitivity of gas sensors using semiconducting metal oxides. © 2010 Elsevier B.V.
- KSP 제안 키워드
- CO concentration, CO gas sensor, Characterization tool, DC method, Layer deposition, Metal-oxide(MOX), NiO composite, Oxide thin films, Semiconducting metal oxides, Sensitivity to, Sensor material