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Conference Paper Rapid Activation of Solution-processed Aluminium Oxide Gate Dielectric Using Flash Lamp Annealing
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Authors
Yeon-Wha Oh, Hoon Kim, Kyu-Ha Baek, Lee-Mi Do, Ga-won Lee, Chan-Mo Kang
Issue Date
2016-11
Citation
MRS Meeting 2016 (Fall), pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Oxide gate dielectric, Solution-processed, aluminium oxide, flash lamp annealing
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