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Conference Paper
Improve the Electrical Properties of In-Ga-Zn-O Thin-film Transistors by Water Flash Lamp Annealing
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- Authors
- Hoon Kim, Chan-mo Kang, Yeon-Wha Oh, Kyu-Ha Baek, Lee-Mi Do
- Issue Date
- 2016-11
- Citation
- MRS Meeting 2016 (Fall), pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Electrical properties, In-Ga-Zn-O, Thin-Film Transistor(TFT), flash lamp annealing, thin film(TF)