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Low-Power-Consumption Metal Oxide NO2 Gas Sensor based on Micro-Heater and Screen Printing Technology
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- Authors
- SeungEon Moon, Hyung Kun Lee, Nakjin Choi, Jonghee Lee, WooSeok Yang, JoonSoo Kim, Jong-Jin Jung, Do-Jun Yoo
- Issue Date
- 2012-09
- Citation
- Journal of Nanoscience and Nanotechnology, v.12, no.7, pp.5543-5546
- ISSN
- 1533-4880
- Publisher
- American Scientific Publishers (ASP),
- Language
- English
- Type
- Journal Article
- Abstract
- An NO 2 micro gas sensor was fabricated based on a micro-heater using tin oxide nano-powders for effective gas detection and monitoring system with low power consumption and high sensitivity. The processes of the fabrication were acceptable to the conventional CMOS processes for massproduction. Semiconducting SnO 2 nano-powders were synthesized via the co-precipitation method; and to increase the sensitivity of the NO 2 gas rare metal dopants were added. In the structure of the micro-heater, the resistances of two semi-circular Pt heaters were connected to the spreader for thermal uniformity. The resistance of each heater becomes an electrically equal Wheatstonebridge, which was divided in half by the heat spreading structure. Based on the aforementioned design, a low-power-consumption micro-heater was fabricated using the CMOS-compatible MEMS processes. A bridge-type micro-heater based on the Si substrate was fabricated via surface micromachining. The NO 2 sensing properties of a screen-printed tin oxide thick ?lm device were measured The micro gas sensors showed substantial sensitivity down to 0.5 ppm NO 2 at a low power consumption (34.2 mW). © 2012 American Scientific Publishers.
- KSP Keywords
- Bridge type, CMOS Process, CMOS-compatible, Gas detection, Heat spreading, High Sensitivity, Metal dopants, Metal-oxide(MOX), Micro gas sensor, Micro-heater, Monitoring system