상세정보
학술지
High-Response and Low-Power-Consumption CO Micro Gas Sensor Based on Nano-Powders and a Micro-Heater
- 발행일
- 201201
- 출처
- Journal of the Korean Physical Society, v.60 no.2, pp.235-239
- ISSN
- 0374-4884
- 출판사
- 한국물리학회
- 협약과제
- 11MB2100, 스마트and그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발, 김종대
- 초록
- In this research, a CO micro gas sensor was fabricated based on a micro-heater by using a tin oxide nano-powder for effective gas detection and a monitoring system with low power consumption and high sensitivity. Tin-oxide-based nano-powders were fabricated using a conventional method and their structural properties were examined by using the scanning electron microscope, X-ray diffractor, etc. Membrane type micro-heater based on Si substrate was fabricated by using complementary metal-oxide semiconductor (CMOS) compatible micro electro mechanical systems (MEMS) process by using bulk micromachining. The gas sensing properties for slurry-dropped tin oxide thick film device were measured for CO gas. The micro gas sensors showed high sensitivity and low power consumption, about 15 mW power consumption, 2 ppm CO could be detected. © 2012 The Korean Physical Society.
- KSP 제안 키워드
- Bulk Micromachining, CO gas, Complementary metal-oxide-semiconductor(CMOS), Conventional methods, Film device, Gas detection, Gas sensing properties, High Sensitivity, Metal-oxide(MOX), Micro gas sensor, Micro-electro-mechanical system(MEMS)