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Fabrication of a HCHO gas sensor based on a MEMS heater and inkjet printing
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- Authors
- Hyung-Kun Lee, Seung Eon Moon, Nak-Jin Choi, Woo Seok Yang, Jongdae Kim
- Issue Date
- 2012-01
- Citation
- Journal of the Korean Physical Society, v.60, no.2, pp.225-229
- ISSN
- 0374-4884
- Publisher
- 한국물리학회
- Language
- English
- Type
- Journal Article
- Abstract
- We have developed In 2O 3 particle ink that can be applied in inkjet printing on a microelectromechanical systems (MEMS) heater and have fabricated semiconductor-type gas sensor based on that heater. The formaldehyde (HCHO) sensor prepared by inkjet printing showed comparable or even higher sensitivity compared to that of the sensor prepared from conventional screen printing when increasing the number of printings was increased. By virtue of its non-contact printing nature, this In 2O 3 ink as a sensing material could be deposited on the MEMS heater without damage to the heater membrane. We found that the sensor prepared on the MEMS heater by using the inkjet deposition technique showed response/recovery times of 7s/17s with a sensitivity of 0. 63 at an 18 mW power and 60 ppb HCHO. © 2012 The Korean Physical Society.
- KSP Keywords
- Deposition technique, Higher sensitivity, Inkjet printing, Micro-electro-mechanical system(MEMS), Non-contact, O 3, Recovery time, Semiconductor-type, Sensing material, Sensor based, contact printing