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Conference Paper Optimization of High Q CMOS-Compatible Microwave Inductors Using Silicon CMOS Technology
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Authors
Min Park, Seonghearn Lee, Hyun Kyu Yu, Kee Soo Nam
Issue Date
1997-06
Citation
International Microwave Symposium (MTT-S) 1997, pp.129-132
Language
English
Type
Conference Paper
Abstract
We present the extensive experimental results showing the important dependences of layout parameters on RF performance of rectangular spiral inductors, in order to determine the optimized layout parameters for designing the high Q inductors used in RF ICs at 2 GHz. The detailed comparative analysis is also carried out to investigate substrate effects by varying the substrate resistivity.
KSP Keywords
CMOS Technology, CMOS-compatible, Comparative analysis, High Q, Optimized layout, RF IC, RF performance, Rectangular Spiral, spiral inductor, substrate effects