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Conference Paper ALD 방법으로 증착된 Al2O3 박막의 열전도도 측정
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Authors
Wonchul Choi, Soojung Kim, Hyundal Jung, Junsoo Kim, Dongsuk Jun, Taehyoung Zyung, Eunsoo Nam, Seungmin Lee, Seungen Moon
Issue Date
2015-02
Citation
강유전체 연합 심포지엄 2015, pp.106-106
Language
Korean
Type
Conference Paper
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