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Conference Paper ALD 방법으로 증착된 Al2O3 박막의 열전도도 측정
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Authors
최원철, Kim Soojung, Hyun Dal Jung, Kim Junsoo, Dong Suk Jun, Taehyoung Zyung, Eun Soo Nam, 이승민, Moon Seungeon
Issue Date
201502
Source
강유전체 연합 심포지엄 2015, pp.106-106
Project Code
14ZB1300, Silicide/Silicon hetero-junction structure for thermoelectric device, Moon Seungeon