상세정보
학술지
Fabrication of Dual-focus Dual-layered Microlens
- 발행일
- 201302
- 출처
- Optics Communications, v.289, pp.69-74
- ISSN
- 0030-4018
- 출판사
- North-Holland
- 초록
- Novel structure of dual-focus microlens array with dual layers is proposed. Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes. The dual lens is formed by combination of a thermally reflowed photo resist lens on a fused quartz lens which is formed by dry etching of the fused quartz substrate. © 2012 Elsevier B.V.
- KSP 제안 키워드
- Dry etching processes, Fused quartz, Microlens array, Photo resist, Photo-lithography, Quartz substrate