BROWSE
Detail
Journal Article
Fabrication of Dual-focus Dual-layered Microlens
Cited 15 time in 
Share 
Share
- Authors
- Jong-Moo Lee, Donghyo Lee, Yongsoon Baek
- Issue Date
- 2013-02
- Citation
- Optics Communications, v.289, pp.69-74
- ISSN
- 0030-4018
- Publisher
- North-Holland
- Language
- English
- Type
- Journal Article
- Abstract
- Novel structure of dual-focus microlens array with dual layers is proposed. Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes. The dual lens is formed by combination of a thermally reflowed photo resist lens on a fused quartz lens which is formed by dry etching of the fused quartz substrate. © 2012 Elsevier B.V.
- KSP Keywords
- Dry etching processes, Fused quartz, Microlens array, Photo resist, Quartz substrate, photo lithography