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Journal Article 1.55 ?m spot-size converter integrated-laser diode fabricated by selective-area metalorganic vapor-phase epitaxy
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Authors
Hyun-Soo Kim, Dae Kon Oh, Moon-Ho Park, Nam Hwang, In-Hoon Choi
Issue Date
2000-06
Citation
Microwave and Optical Technology Letters, v.25, no.5, pp.300-302
ISSN
0895-2477
Publisher
Wiley
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1002/(SICI)1098-2760(20000605)25:5<300::AID-MOP4>3.0.CO;2-S
Abstract
A 1.55 μm spot-size converter integrated-laser diode (SSC-LD) with a vertically tapered-thickness waveguide was fabricated by using selective-area metalorganic vapor-phase epitaxy (MOVPE). A tapered-thickness profile and PL wavelength shift as large as 238 nm in the waveguide were obtained by using an exponentially tapered shape mask. The SSC-LD exhibited a high slope efficiency of 0.31 W/A and a beam divergence 6.9째×12.4째 without facet coating. The coupling loss between the LD and SMF was measured to be 2.76 dB, and the 1 dB alignment tolerances were 짹2.4 μm for the horizontal direction, 짹2.0 μm for the vertical direction, and 13 μm for the longitudinal direction.