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Conference Paper The Highly Stable InGaZnO TFTs Deposited by High Density Plasma Sputtering
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Authors
Cho Sung Haeng, Hwang Chi-Sun, 노영석, J. -R. Lee, 김성봉, S. J. Yoo, Hee-Ok Kim, Kwon Ohsang, Park Eunsuk, Park Sang-Hee
Issue Date
201502
Source
International Thin-Film Transistor Conference (ITC) 2015, pp.17-18
Project Code
14PB2600, Utilizing Technology Development for Oxide Thin-Film Transistor Sputtering Deposition Equipment on Width 1500mm Flexible substrates, Cho Sung Haeng
KSP Keywords
High density plasma, Highly stable, InGaZnO TFTs, Plasma sputtering