상세정보
학술지
Photolithography-based Carbon Nanotubes Patterning for Field Emission Displays
- 발행일
- 200101
- 출처
- Materials Science and Engineering B, v.79 no.2, pp.128-132
- ISSN
- 0921-5107
- 출판사
- Elsevier
- 협약과제
- 00MM1800, 300cd/㎡고휘도 /저전력 FED 개발, 조경익
- 초록
- Carbon nanotubes (CNTs) emitters were successfully patterned in small pixels (50×50 μm2) by using photolithography process on a hard metal electrode for field emission displays (FEDs) application. The CNTs particles in the patterned pixels were uniformly distributed on 2-inch diagonal substrates. The maximum diameter of CNTs particles could be controlled less than 20 μm. After patterning and heat treatment process below 300 °C, most of CNTs bundles on the cathode electrode were aligned perpendicular to the substrates. The threshold electric field of emission for patterned CNTs was about 4.2 V μm-1 and the field enhancement factor derived from the Fowler-Nordheim plots of the electron emissions was about 100 000 in the high voltage region. This newly developed process can be applicable to field emitter arrays for high resolution FEDs.
- KSP 제안 키워드
- Carbon nano-tube(CNT), Carbon nanotubes patterning, Cathode electrode, Fowler-Nordheim plots, Hard metal, Heat Treatment Process, High Voltage, High-resolution, Maximum diameter, Photolithography process, Threshold electric field