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Journal Article
Photolithography-based Carbon Nanotubes Patterning for Field Emission Displays
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- Authors
- Young-Rae Cho, Jin Ho Lee, Yoon-Ho Song, Seung-Youl Kang, Chi-Sun Hwang, Moon-Youn Jung, Do-Hyung Kim, Sang-Kyun Lee, Hyun-Seok Uhm, Kyoung Ik Cho
- Issue Date
- 2001-01
- Citation
- Materials Science and Engineering B, v.79, no.2, pp.128-132
- ISSN
- 0921-5107
- Publisher
- Elsevier
- Language
- English
- Type
- Journal Article
- Abstract
- Carbon nanotubes (CNTs) emitters were successfully patterned in small pixels (50×50 μm2) by using photolithography process on a hard metal electrode for field emission displays (FEDs) application. The CNTs particles in the patterned pixels were uniformly distributed on 2-inch diagonal substrates. The maximum diameter of CNTs particles could be controlled less than 20 μm. After patterning and heat treatment process below 300 °C, most of CNTs bundles on the cathode electrode were aligned perpendicular to the substrates. The threshold electric field of emission for patterned CNTs was about 4.2 V μm-1 and the field enhancement factor derived from the Fowler-Nordheim plots of the electron emissions was about 100 000 in the high voltage region. This newly developed process can be applicable to field emitter arrays for high resolution FEDs.
- KSP Keywords
- Carbon nano-tube(CNT), Carbon nanotubes patterning, Cathode electrode, Field Enhancement Factor, Field emission displays(FEDs), Field emitter array(FEA), Fowler-Nordheim plots, High Voltage, High resolution, Maximum diameter, Photolithography process