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Conference Paper Deep trench guard technology to suppress coupling between inductors in silicon RF ICs
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Authors
Cheon Soo Kim, Piljae Park, Joung-Woo Park, Nam Hwang, Hyun Kyu Yu
Issue Date
2001-05
Citation
International Microwave Symposium (IMS) 2001, pp.1873-1876
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1109/MWSYM.2001.967273
Abstract
Trench guard technology was proposed to suppress the coupling between inductors, and to reduce crosstalk in silicon RF ICs. The test structure adopting a deep trench guard ring showed a coupling less than -40 dB in the frequency range of 0.5-20 GHz, and negligible change in designed inductance value up to 10 GHz. Furthermore, it can be also used to isolate a noisy circuit block from other quiet blocks in mixed signal silicon RF ICs.
KSP Keywords
10 Ghz, Deep Trench, Frequency Range, Inductance value, RF IC, Test structures, guard ring, mixed signal