상세정보
학술지
MOVPE Growth of Highly-Strained Piezoelectric InGaAs/GaAs Quantum Wells on [1 1 1]A-Oriented Substrates
- 저자
- 김종석, Soo Haeng Cho, A. Sanz-Herva´s, A. Majerfelda, 김병휘
- 발행일
- 200105
- 출처
- Journal of Crystal Growth, v.225 no.2-4, pp.415-419
- ISSN
- 0022-0248
- 출판사
- Elsevier
- 협약과제
- 01MT2500, 1.3Tb/s 광 회선분배 시스템(OXC)기술, 김해근
- 초록
- In this paper we present a study on the MOVPE growth and optical evaluation of strained InGaAs/GaAs quantum well (QW) structures with In contents of 17% and 22% on [1 1 1]A-oriented GaAs substrates. QW structures grown under different growth conditions were extensively analyzed by means of Photoluminescence (PL) spectroscopy. The dependence of the PL intensity and linewidth on the growth temperature and In content are investigated and compared to simultaneously grown [1 0 0]-oriented structures. It is shown that excellent QW interfaces with only 짹(1-2) monolayer roughness were achieved for the [1 1 1]A-oriented structures with 17% In using a wide range of growth temperatures (550-670°C), whereas the interfacial properties of the [1 0 0] samples significantly degraded as the growth temperature was increased. For a [1 1 1]A QW structure with 22% In the PL characteristics are similar to those obtained for the 17% In sample; on the contrary, for the companion [1 0 0] sample a strong degradation of its optical properties is observed. © 2001 Elsevier Science B.V.
- KSP 제안 키워드
- A-oriented, GaAs substrates, Growth conditions, InGaAs/GaAs quantum wells, Interfacial Properties, MOVPE growth, Optical evaluation, PL intensity, Photoluminescence (PL) spectroscopy, Quantum Well(QW), Wide range