상세정보
학술지
A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air
- 발행일
- 200203
- 출처
- Sensors and Actuators B : Chemical, v.83 no.1-3, pp.250-255
- ISSN
- 0925-4005
- 출판사
- Elsevier
- 협약과제
- 01MB2200, 초미세 생체신호 통신용 마이크로소자 핵심기술, 이번
- 초록
- A microsensor array with the highly sensitive porous tin oxide thin films employing the noble metal catalysts of Pt and Au on a new microhotplate, dangled in air by Pt bonding wires, has been designed and fabricated. The microhot plate was made of N/O/N Si diaphragm with area of 1.9 mm × 2.1 mm. Power consumption was reduced by decreasing the thickness of substrate. The sensor array was applied to recognizing the explosive gases within the range of threshold limit values (TLVs), employing principal component analysis. The result showed that the micro sensor array was qualified for classifying obviously the kinds and quantities of the explosive gases. © 2002 Elsevier Science B.V. All rights reserved.
- KSP 제안 키워드
- Bonding wires, Explosive gases, Highly sensitive, Microsensor array, Noble metal catalysts, Power Consumption, Principal Component analysis, Tin oxide thin films, thin film(TF), threshold limit