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Journal Article
In Situ Curing of Sliding SU-8 Droplet over a Microcontact Printed Pattern for Tunable Fabrication of a Polydimethylsiloxane Nanoslit
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- Authors
- Chang-Beom Kim, Honggu Chun, JaeHun Chung, Kwang Ho Lee, Jeong Hoon Lee, Ki-Bong Song, Sang-Hoon Lee
- Issue Date
- 2011-09
- Citation
- Analytical Chemistry, v.83, no.18, pp.7221-7226
- ISSN
- 0003-2700
- Publisher
- American Chemical Society(ACS)
- Language
- English
- Type
- Journal Article
- Abstract
- A tunable process for polydimethylsiloxane (PDMS) nanoslit fabrication is developed for nanofluidic applications. A microcontact printing (μCP) of a laterally spreading self-assembled hexadecanethiol (HDT) layer, combined with in situ curing of a sliding SU-8 droplet, enables precise and independent tuning of a nanoslit-mold width and height using a single μCP master mold. The SU-8 nanoslit-mold is replicated using a hard-soft composite PDMS to prevent channel collapse at low (<0.2) aspect ratio (height over width). The fluidic characteristics as well as dimensions of nanoslits fabricated with various conditions are analyzed using a fluorescein sample and AFM images. Finally, concentration polarization-based sample preconcentration is successfully demonstrated at the nanoslit boundary where an electric double-layer is overlapped. © 2011 American Chemical Society.
- KSP Keywords
- AFM images, Concentration polarization, Electric double layer(EDL), Hard-soft, Master mold, Microcontact printing(CP), Printed pattern, SU-8, Various conditions, aspect ratio, independent tuning