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Conference Paper A Capacitive-Type MEMS Acoustic Sensor with a Diaphragm of Al/Si3N4/Al Based on a Polyimide Sacrificial Layer

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Authors: J. Lee, C.H. Je, Y.-G. Kim, S.Q. Lee, W.S. Yang, S.-G. Lee

Issue Date: 2015-01

Citation: International Conference on Electronics, Information and Communication (ICEIC) 2015, pp.228-229

Language: English

Type: Conference Paper

KSP Keywords: Acoustic Sensor, Capacitive-type, Sacrificial layer

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