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Micromachined piezoelectric membrane acoustic device
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- Issue Date
- 2003-01
- Citation
- Sensors and Actuators A : Physical, v.103, no.1-2, pp.130-134
- ISSN
- 0924-4247
- Publisher
- Elsevier
- Language
- English
- Type
- Journal Article
- Abstract
- This paper reports on a 3 mm × 3 mm × 0.003 mm piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low-stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer (LDV), is 1 μm at 7.3 kHz with input drive 15 V0-P (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15 V0-P. The distance between the reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of the microphone is 0.51 reV/Pa at 7.3 kHz with noise level of 18 dB SPL. © 2003 Elsevier Science B.V. All rights reserved.
- KSP Keywords
- Laser doppler vibrometer, Low stress, Piezoelectric membrane, Piezoelectric thin film, Sound pressure level, Zinc oxide(ZnO), acoustic device, maximum deflection, noise level, silicon nitride membrane, thin film(TF)