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Journal Article Micromachined piezoelectric membrane acoustic device
Cited 184 time in scopus Share share facebook twitter linkedin kakaostory
Authors
Sang Choon Ko, Yong Chul Kim, Seung Seob Lee, Seung Ho Choi, Sang Ryong Kim
Issue Date
2003-01
Citation
Sensors and Actuators A : Physical, v.103, no.1-2, pp.130-134
ISSN
0924-4247
Publisher
Elsevier
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1016/S0924-4247(02)00310-2
Abstract
This paper reports on a 3 mm × 3 mm × 0.003 mm piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 μm thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 μm thick low-stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer (LDV), is 1 μm at 7.3 kHz with input drive 15 V0-P (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15 V0-P. The distance between the reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of the microphone is 0.51 reV/Pa at 7.3 kHz with noise level of 18 dB SPL. © 2003 Elsevier Science B.V. All rights reserved.
KSP Keywords
Laser doppler vibrometer, Low stress, Piezoelectric membrane, Piezoelectric thin film, Sound pressure level, Zinc oxide(ZnO), acoustic device, maximum deflection, noise level, silicon nitride membrane, thin film(TF)